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      突破現有CMOS工藝限制的晶體管技術


      www.elainecharton.com 2008年3月28日

          


       Freescale半導體公司的ITFET(Inverted T Channel-Field Effect Transistor)技術實現了在一個單一晶體管中結合了平面和垂直薄體結構,克服了垂直多柵晶體管所面臨的許多設計和生產上的挑戰,有望開創高性能、低功耗、小體積的新一代半導體器件。   通過結合CMOS的穩定性和垂直CMOS的低漏電流等優點,該項技術結束了平面CMOS和垂直CMOS之間的爭論,在單一器件內實現了兩者的綜合優點。    由于在垂直溝道下的平面區混合了硅,并且增加了溝道寬度,ITFET的垂直區和平面區可提供增強的電流能力,可降低寄生電阻,增強垂直溝道的機械穩定性。同傳統CMOS相比,該技術可實現多柵極、有更大的驅動電流,可降低漏電流,比其他平面薄體CMOS和垂直多柵CMOS具有更多優點,如:更低的漏電流、更低的寄生電容、更高的導通電流等。該ITFET技術計劃應用于基于45nm及以上工藝的高端器件。

       
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